Effect of growth temperature on the key properties of aluminum-doped zinc oxide thin films prepared by atomic layer deposition
Crossref DOI link: https://doi.org/10.1557/mrc.2019.82
Published Online: 2019-09-20
Published Print: 2019-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Güneri, Emine
Stadler, Bethanie
Text and Data Mining valid from 2019-09-01
Version of Record valid from 2019-09-01
Article History
Received: 24 April 2019
Accepted: 6 June 2019
First Online: 20 September 2019