SVM based layout retargeting for fast and regularized inverse lithography
Crossref DOI link: https://doi.org/10.1631/jzus.C1300357
Published Online: 2014-05-09
Published Print: 2014-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Luo, Kai-sheng
Shi, Zheng
Yan, Xiao-lang
Geng, Zhen
Text and Data Mining valid from 2014-05-01
