A combined modulated feedback and temperature compensation approach to improve bias drift of a closed-loop MEMS capacitive accelerometer
Crossref DOI link: https://doi.org/10.1631/FITEE.1400349
Published Online: 2015-06-11
Published Print: 2015-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ma, Ming-jun
Jin, Zhong-he
Zhu, Hui-jie
Text and Data Mining valid from 2015-06-01