Displacement measuring grating interferometer: a review
Crossref DOI link: https://doi.org/10.1631/FITEE.1800708
Published Online: 2019-06-18
Published Print: 2019-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Hu, Peng-cheng http://orcid.org/0000-0002-2471-7036
Chang, Di
Tan, Jiu-bin
Yang, Rui-tao
Yang, Hong-xing
Fu, Hai-jin
Text and Data Mining valid from 2019-05-01
Version of Record valid from 2019-05-01
Article History
Received: 7 November 2018
Accepted: 23 February 2019
First Online: 18 June 2019