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Model of a Micromechanical Mode-Localized Accelerometer with an Initially Curved Microbeam as a Sensitive Element

Published Online: 2023-07-13

Published Print: 2023-06

Authors

Indeitsev, D. A.

Mozhgova, N. V.

Lukin, A. V.

Popov, I. A.
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Text and Data Mining valid from 2023-06-01

Version of Record valid from 2023-06-01
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Article History

Received: 19 August 2022

Revised: 7 September 2022

Accepted: 8 September 2022

First Online: 13 July 2023

Document is current