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A New Method for Relaxation of Elastic Stresses During the Growth of Heteroepitaxial Films

Published Online: 2023-05-11

Published Print: 2023-06

Authors

Koryakin, A. A.

Kukushkin, S. A.

Osipov, A.V.

Sharofidinov, Sh. Sh.

Shcheglov, M. P.
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Text and Data Mining valid from 2023-05-11

Version of Record valid from 2023-05-11
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Article History

Received: 2 October 2022

Revised: 10 November 2022

Accepted: 11 November 2022

First Online: 11 May 2023

Document is current