Crossmark

Plasma parameters in a dual-camera low-power inductive RF discharge with an external magnetic field

Published Online: 2016-02-05

Published Print: 2015-11

Authors

Petrov, A. K.

Vavilin, K. V.

Kozlov, G. P.

Kralkina, E. A.

Nekliudova, P. A.

Nikonov, A. M.

Pavlov, V. B.
License Information

Text and Data Mining valid from 2015-11-01

Version of Record valid from 2015-11-01
More Information

Article History

Received: 10 April 2015

Accepted: 6 July 2015

First Online: 5 February 2016

Document is current