Crossmark

An error self-compensation mechanism for deposition of optical coatings with broadband optical monitoring

Published Online: 2017-07-23

Published Print: 2017-05

Authors

Tikhonravov, A. V.

Kochikov, I. V.

Trubetskov, M. K.

Sharapova, S. A.

Zhupanov, V. G.

Yagola, A. G.
License Information

Text and Data Mining valid from 2017-05-01

Version of Record valid from 2017-05-01
More Information

Article History

Received: 11 November 2016

Accepted: 7 December 2016

First Online: 23 July 2017

Document is current