The Formation of Helium Bubbles in Silicon Surface Layers via Plasma Immersion Ion Implantation
Crossref DOI link: https://doi.org/10.3103/S0027134917060108
Published Online: 2018-04-03
Published Print: 2017-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Lomov, A. A.
Chesnokov, Yu. M.
Oreshko, A. P.
Text and Data Mining valid from 2017-11-01
Article History
Received: 2 November 2016
Accepted: 26 December 2016
First Online: 3 April 2018