The Validity of the Results of High-Performance Modeling of SiO2 Film Growth
Crossref DOI link: https://doi.org/10.3103/S0027134917060248
Published Online: 2018-04-03
Published Print: 2017-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhupanov, V. G.
Grigoriev, F. V.
Sulimov, V. B.
Tikhonravov, A. V.
Text and Data Mining valid from 2017-11-01
Article History
Received: 14 October 2016
Accepted: 17 May 2017
First Online: 3 April 2018