Exploring the Influence of a Focusing and Gaussian Profile Electron Beam in SEM Imaging through Monte Carlo Simulation
Crossref DOI link: https://doi.org/10.3103/S0027134918010174
Published Online: 2018-04-24
Published Print: 2018-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhang, P.
Text and Data Mining valid from 2018-01-01
Article History
Received: 6 July 2017
First Online: 24 April 2018