Dependence of the Thin Films Porosity On the Deposition Conditions: Results of the Molecular Dynamics Simulation
Crossref DOI link: https://doi.org/10.3103/S0027134919020073
Published Online: 2019-06-11
Published Print: 2019-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Grigoriev, F. V.
Sulimov, V. B.
Tikhonravov, A. V.
Text and Data Mining valid from 2019-03-01
Version of Record valid from 2019-03-01
Article History
Received: 19 October 2018
Revised: 6 November 2018
Accepted: 7 November 2018
First Online: 11 June 2019