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Tomography of Three-Layer Structures in Scanning Electron Microscopy in the Backscattered Electron Detection Mode

Published Online: 2025-01-17

Published Print: 2024-10

Authors

Borzunov, A. A.

Rau, E. I.

Zaitsev, S. V.

Koshev, N. A.

Lukyanenko, D. V.

Yagola, A. G.
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Text and Data Mining valid from 2024-10-01

Version of Record valid from 2024-10-01
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Article History

Received: 4 April 2024

Revised: 24 April 2024

Accepted: 14 June 2024

First Online: 17 January 2025

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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