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Specialized Rectangular Mask Pattern Design to Neutralize Charging Effects

Published Online: 2025-05-11

Published Print: 2025-02

Authors

Zhang, Peng
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Text and Data Mining valid from 2025-02-01

Version of Record valid from 2025-02-01
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Article History

Received: 19 October 2024

Revised: 24 October 2024

Accepted: 24 October 2024

First Online: 11 May 2025

CONFLICT OF INTEREST

: The author of this work declares that he has no conflicts of interest.

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