The Technique of thin Zinc Oxide Films Synthesis by ALD Method
Crossref DOI link: https://doi.org/10.3103/S1052618820100064
Published Online: 2021-02-13
Published Print: 2020-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kulakov, O. I.
Text and Data Mining valid from 2020-12-01
Version of Record valid from 2020-12-01
Article History
Received: 1 April 2020
Accepted: 29 June 2020
First Online: 13 February 2021