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Conductance of Channels of a Dry Screw Vacuum Pump in the Molecular Gas Flow Mode

Published Online: 2022-12-08

Published Print: 2022-12

Authors

Laskin, A. A.

Raykov, A. A.

Burmistrov, A. V.

Salikeev, S. I.
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Text and Data Mining valid from 2022-12-01

Version of Record valid from 2022-12-01
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Article History

Received: 10 April 2022

Revised: 17 May 2022

Accepted: 21 June 2022

First Online: 8 December 2022

CONFLICT OF INTEREST

: The authors declare they have no conflicts of interests.

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