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Using Machine Learning Methods to Predict the Magnitude and the Direction of Mask Fragments Displacement in Optical Proximity Correction (OPC)

Crossref DOI link: https://doi.org/10.3103/S1060992X21040056

Published Online: 2021-12-29

Published Print: 2021-10

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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