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Off-Electrode Plasma of High-Voltage Gas Discharge for Micro- and Nanotechnology Problems

Published Online: 2024-12-23

Published Print: 2024-12

Authors

Kolpakov, V. A.

Krichevskiy, S. V.

Markushin, M. A.
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Text and Data Mining valid from 2024-12-01

Version of Record valid from 2024-12-01
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Article History

Received: 11 July 2024

Revised: 30 September 2024

Accepted: 30 September 2024

First Online: 23 December 2024

CONFLICT OF INTEREST

: The author of this work declares that he has no conflicts of interest.

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