A new approach to probing the depths of multilayer structures in SEM
Crossref DOI link: https://doi.org/10.3103/S106287381511026X
Published Online: 2015-11-25
Published Print: 2015-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhdanov, G. S.
Lozhkin, M. S.
Text and Data Mining valid from 2015-11-01