Varying the Composition of Ferroelectric Films during Ion-Plasma Sputtering: Simulation and Experiment
Crossref DOI link: https://doi.org/10.3103/S1062873818030322
Published Online: 2018-04-04
Published Print: 2018-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Tumarkin, A. V.
Volpyas, V. A.
Zlygostov, M. V.
Odinets, A. A.
Sapego, E. N.
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First Online: 4 April 2018