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Dependence of the Shape of the Dislocation Etch Pits of an Epitaxial GeSi (001)-Si Film on the Film’s Thickness

Crossref DOI link: https://doi.org/10.3103/S1062873819060121

Published Online: 2019-07-23

Published Print: 2019-06

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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