Studying the Elastic Stresses at the Edges of a Section of the SOI Heterostructure of a Micro-Electromechanical Pressure Transducer with an Isolated Tensoframe
Crossref DOI link: https://doi.org/10.3103/S1062873819110248
Published Online: 2019-12-04
Published Print: 2019-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Sokolov, L. V.
Text and Data Mining valid from 2019-11-01
Version of Record valid from 2019-11-01
Article History
Received: 29 April 2019
Revised: 10 June 2019
Accepted: 27 July 2019
First Online: 4 December 2019