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Thermal Stability of Ferroelectric Films Based on Hafnium–Zirconium Dioxide on Silicon

Published Online: 2023-07-18

Published Print: 2023-06

Authors

Popov, V. P.

Antonov, V. A.

Tikhonenko, F. V.

Myakonkikh, A. V.

Rudenko, K. V.
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Text and Data Mining valid from 2023-06-01

Version of Record valid from 2023-06-01
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Article History

Received: 5 December 2022

Revised: 23 December 2022

Accepted: 27 February 2023

First Online: 18 July 2023

CONFLICT OF INTEREST

: The authors declare that they have no conflicts of interest.

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