Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation
Crossref DOI link: https://doi.org/10.3103/S1063457615020057
Published Online: 2015-04-24
Published Print: 2015-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Antonyuk, V. S.
Bilokin’, S. O.
Bondarenko, M. O.
Bondarenko, Yu. Yu.
Kovalenko, Yu. I.
Text and Data Mining valid from 2015-03-01