Material removal rate in polishing anisotropic monocrystalline materials for optoelectronics
Crossref DOI link: https://doi.org/10.3103/S1063457616020064
Published Online: 2016-05-15
Published Print: 2016-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Filatov, O. Yu.
Sidorko, V. I.
Kovalev, S. V.
Filatov, Yu. D.
Vetrov, A. G.
Text and Data Mining valid from 2016-03-01
Version of Record valid from 2016-03-01
Article History
Received: 25 May 2015
First Online: 15 May 2016