Formation of flat surfaces of optoelectronic components in diamond polishing
Crossref DOI link: https://doi.org/10.3103/S1063457617020083
Published Online: 2017-04-28
Published Print: 2017-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Filatov, Yu. D.
Sidorko, V. I.
Kovalev, S. V.
Vetrov, A. G.
License valid from 2017-03-01