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Deposition and Characterization of Thin Si-B-C-N Films by DC Reactive Magnetron Sputtering of Composed Si/B4C Target

Crossref DOI link: https://doi.org/10.3103/S1063457619020035

Published Online: 2019-05-04

Published Print: 2019-03

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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