Coupling Effects of CH4/H2/Ar Gas Ratios and Hot Filament-Substrate Distance on the Growth of Nanocrystalline Diamond
Crossref DOI link: https://doi.org/10.3103/S106345762003003X
Published Online: 2020-09-20
Published Print: 2020-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Biao Deng,
Wei, Qiuping
Yi, Mingkun
Luo, Yijie
Li, Liang
Zhou, Kechao
Ma, Li
Text and Data Mining valid from 2020-05-01
Version of Record valid from 2020-05-01
Article History
Received: 8 January 2019
Revised: 27 February 2019
Accepted: 1 March 2019
First Online: 20 September 2020