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Structure and Properties of Ta–Si–N Coatings Produced by Pulsed Magnetron Sputtering

Published Online: 2021-11-05

Published Print: 2021-09

Authors

Sytchenko, A. D.

Levashov, E. A.

Kiryukhantsev-Korneev, Ph. V.
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Text and Data Mining valid from 2021-09-01

Version of Record valid from 2021-09-01
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Article History

Received: 2 February 2021

Revised: 10 March 2021

Accepted: 16 March 2021

First Online: 5 November 2021

Document is current