Features of the Surface Region of the Semiconductor Structure Formed by Metal-Assisted Chemical Etching of Single-Crystal Silicon
Crossref DOI link: https://doi.org/10.3103/S1068335619100063
Published Online: 2019-11-22
Published Print: 2019-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Melnik, N. N.
Tregulov, V. V.
Rybin, N. B.
Ivanov, A. I.
Text and Data Mining valid from 2019-10-01
Version of Record valid from 2019-10-01
Article History
Received: 1 July 2019
Accepted: 16 October 2019
First Online: 22 November 2019