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Optical and Soft X-ray Microlithography at the Turn of the Century

Crossref DOI link: https://doi.org/10.3103/S1068335623160029

Published Online: 2023-09-18

Published Print: 2023-09

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Artyukov, I. A.
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Text and Data Mining valid from 2023-09-01

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Article History

Received: 16 September 2022

Revised: 16 September 2022

Accepted: 8 December 2022

First Online: 18 September 2023