Computational Modeling of Magnetron Sputtering for Thin-Film Materials: Optimizing Deposition and Analyzing Morphology
Crossref DOI link: https://doi.org/10.3103/S1068335624600694
Published Online: 2024-11-03
Published Print: 2024-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Abdelkader, Bouazza
Text and Data Mining valid from 2024-09-01
Version of Record valid from 2024-09-01
Article History
Received: 1 July 2024
Revised: 14 July 2024
Accepted: 15 July 2024
First Online: 3 November 2024
CONFLICT OF INTEREST
: As author of this work, I declare that I have no conflicts of interest.