Investigation of RF Originated ‘Cold’ Plasma Parameters in Capacitive Coupled Reactor
Crossref DOI link: https://doi.org/10.3103/S1068337219010134
Published Online: 2019-04-05
Published Print: 2019-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Sargsyan, S. T.
Text and Data Mining valid from 2019-01-01
Article History
Received: 9 January 2019
First Online: 5 April 2019