Crossmark

Features of the Interaction of a Radio-Frequency Discharge of Freon R-23 (CHF3) with Gallium Arsenide and Silicon

Published Online: 2023-04-04

Published Print: 2023-02

Authors

Dunaev, A. V.
License Information

Text and Data Mining valid from 2023-02-01

Version of Record valid from 2023-02-01
More Information

Article History

Received: 28 June 2021

Revised: 23 August 2021

Accepted: 27 August 2021

First Online: 4 April 2023

CONFLICT OF INTEREST

: The author declares that he has no conflicts of interest.

Document is current