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Substructure of β-SiC Films Synthesized on the Surface of Vacuum and Air Cleavage of Mono-Si

Published Online: 2025-07-11

Published Print: 2025-05

Authors

Soldatenko, S. A.

Tekutyeva, V. O.

Lukin, A. A.
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Text and Data Mining valid from 2025-05-01

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Article History

Received: 2 May 2023

First Online: 11 July 2025

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflict of interest.

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