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Reduction of Nonuniformity of the Magnetic Field of an Elongated Magnetron Sputtering System with a Rotating Cathode

Published Online: 2025-09-05

Published Print: 2025-08

Authors

Komarovskaya, V. M.

Pologov, A. S.

Tereshchuk, O. I.

Sechko, I. A.
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Text and Data Mining valid from 2025-08-01

Version of Record valid from 2025-08-01
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Article History

Received: 4 May 2023

First Online: 5 September 2025

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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