Gas Flow in a Multistage Turbomolecular Vacuum Pump
Crossref DOI link: https://doi.org/10.3103/S1068798X20070138
Published Online: 2020-07-31
Published Print: 2020-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Fomin, M. V.
Chernyshev, O. R.
Text and Data Mining valid from 2020-07-01
Version of Record valid from 2020-07-01
Article History
Received: 15 November 2018
Revised: 7 December 2018
Accepted: 27 February 2019
First Online: 31 July 2020
CONFLICT OF INTEREST
: The authors declare that they have no conflicts of interest.