Laser technologies in micro-optics. Part 1. Fabrication of diffractive optical elements and photomasks with amplitude transmission
Crossref DOI link: https://doi.org/10.3103/S8756699017050077
Published Online: 2017-12-16
Published Print: 2017-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Veiko, V. P.
Korolkov, V. P.
Poleshchuk, A. G.
Sinev, D. A.
Shakhno, E. A.
License valid from 2017-09-01