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Method of Calibration of a Laser-Based Galvanometric Scanning System with Submicron Resolution

Published Online: 2018-09-28

Published Print: 2018-07

Authors

Bessmeltsev, V. P.

Goloshevsky, N. V.

Kasterov, V. V.

Kipriyanov, Ya. A.

Smirnov, K. K.
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Text and Data Mining valid from 2018-07-01

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Article History

Received: 22 February 2018

First Online: 28 September 2018

Document is current