Ellipsometric Method of Substrate Temperature Measurement in Low-Temperature Processes of Epitaxy of InSb Layers
Crossref DOI link: https://doi.org/10.3103/S8756699019010023
Published Online: 2019-04-05
Published Print: 2019-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Shvets, V. A.
Azarov, I. A.
Rykhlitskii, S. V.
Toropov, A. I.
Text and Data Mining valid from 2019-01-01
Article History
Received: 12 October 2018
Accepted: 1 November 2018
First Online: 5 April 2019