From Self-Organization of Monoatomic Steps on the Silicon Surface to Subnanometer Metrology
Crossref DOI link: https://doi.org/10.3103/S8756699020050118
Published Online: 2021-03-20
Published Print: 2020-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Sheglov, D. V.
Sitnikov, S. V.
Fedina, L. I.
Rogilo, D. I.
Kozhukhov, A. S.
Latyshev, A. V.
Text and Data Mining valid from 2020-09-01
Version of Record valid from 2020-09-01
Article History
Received: 29 June 2020
Revised: 5 August 2020
Accepted: 10 August 2020
First Online: 20 March 2021