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Production of Planar Elements of Terahertz Optics by Means of Deep X-Ray Lithography

Published Online: 2022-08-28

Published Print: 2022-04

Authors

Gentselev, A. N.

Baev, S. G.
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Text and Data Mining valid from 2022-04-01

Version of Record valid from 2022-04-01
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Article History

Received: 29 December 2021

Revised: 16 February 2022

Accepted: 11 March 2022

First Online: 28 August 2022

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