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PtSi/poly-Si Structures for IR Detectors: Investigation of the Formation Processes and Development of the Method for Their Fabrication

Published Online: 2023-03-20

Published Print: 2022-12

Authors

Chizh, K. V.

Arapkina, L. V.

Dubkov, V. P.

Stavrovskii, D. B.

Yuryev, V. A.

Storozhevykh, M. S.
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Text and Data Mining valid from 2022-12-01

Version of Record valid from 2022-12-01
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Article History

Received: 23 September 2022

Revised: 11 October 2022

Accepted: 21 October 2022

First Online: 20 March 2023

CONFLICT OF INTEREST

: The authors declare that they have no conflicts of interest.

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