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Ellipsometry Equation for the Structure Substrate–Uniaxial Anisotropic Film with the Optical Axis in the Plane of Incidence

Published Online: 2024-10-07

Published Print: 2024-06

Authors

Shvets, V. A.

Azarov, I. A.

Spesivtsev, E. V.
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Text and Data Mining valid from 2024-06-01

Version of Record valid from 2024-06-01
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Article History

Received: 27 March 2024

Revised: 22 April 2024

Accepted: 22 April 2024

First Online: 7 October 2024

CONFLICT OF INTEREST

: The authors of this work declare that they do not have a conflicts of interest.

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