Crossmark

Effect of Humidity and an Electrical Field on the Process of Local Anode Oxidation by an Atomic Force Microscope Probe on the Si(111) Surface

Published Online: 2025-01-14

Published Print: 2024-08

Authors

Shcheglov, D. V.

Fedina, L. I.

Latyshev, A. V.
License Information

Text and Data Mining valid from 2024-08-01

Version of Record valid from 2024-08-01
More Information

Article History

Received: 22 May 2024

Revised: 25 June 2024

Accepted: 5 July 2024

First Online: 14 January 2025

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

Document is current