Singularities of the Thin AlN Layers Formation by Molecular Beam Epitaxy On 3C-SiC/Si(111) Templates with On-Axis and 4° Off-Axis Disorientation
Crossref DOI link: https://doi.org/10.3103/S0025654420010045
Published Online: 2020-08-31
Published Print: 2020-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Babaev, A. V.
Nevolin, V. K.
Statsenko, V. N.
Fedotov, S. D.
Tsarik, K. A.
Text and Data Mining valid from 2020-01-01
Version of Record valid from 2020-01-01
Article History
Received: 10 March 2019
Revised: 4 April 2019
Accepted: 24 April 2019
First Online: 31 August 2020