Nanometer Scale Lithography with Evaporated Polystyrene
Crossref DOI link: https://doi.org/10.3103/S0027134917060224
Published Online: 2018-04-03
Published Print: 2017-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zharik, G. A.
Dagesyan, S. A.
Soldatov, E. S.
Presnov, D. E.
Krupenin, V. A.
Text and Data Mining valid from 2017-11-01
Article History
Received: 22 November 2016
Accepted: 12 July 2017
First Online: 3 April 2018