The Influence of Xenon and Argon Ion Irradiation Parameters on Defect Formation in Silicon
Crossref DOI link: https://doi.org/10.3103/S0027134920030030
Published Online: 2020-10-13
Published Print: 2020-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Balakshin, Yu. V.
Kozhemiako, A. V.
Evseev, A. P.
Minnebaev, D. K.
Elsehly, Emad M.
Text and Data Mining valid from 2020-05-01
Version of Record valid from 2020-05-01
Article History
Received: 11 March 2020
Revised: 16 March 2020
Accepted: 20 March 2020
First Online: 13 October 2020