In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing
Crossref DOI link: https://doi.org/10.3103/S1063457617040086
Published Online: 2017-09-09
Published Print: 2017-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Filatov, Yu. D.
Sidorko, V. I.
Kovalev, S. V.
Filativ, O. Yu.
Monteil, G.
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