Plasma-Enhanced CVD Equipment for Deposition of Nanocomposite Nanolayered Films
Crossref DOI link: https://doi.org/10.3103/S1063457619010040
Published Online: 2019-04-24
Published Print: 2019-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Porada, O. K.
Ivashchenko, V. I.
Ivashchenko, L. A.
Kozak, A. O.
Sytikov, O. O.
Text and Data Mining valid from 2019-01-01
Article History
Received: 4 October 2017
Revised: 4 October 2017
Accepted: 23 November 2017
First Online: 24 April 2019